TPS73725DCQR_TPS7B6933QDCYRQ1 Introduction

. With the maturity and progress of the process technology and the increase in market demand, more and more companies use advanced processes below 20nm to design and produce ICs and devices, which makes more and more IDMs and foundries eliminate low-efficiency production. fab.

From a regional perspective, Japan closed the largest number of fabs. It is reported that Renesas expects to close two more 150mm fabs in 2020 or 2021. Take Renesas as an example. The company's two recently closed fabs are both 150mm, including a fab in Kochi Prefecture, Japan, which produces analog, logic devices and some obsolete micro components. In addition, Renesas has adjusted its factory in Otsu, Shiga Prefecture, Japan, to manufacture optoelectronic devices.

TPS73725DCQR_TPS7B6933QDCYRQ1

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The most basic structure of the BAW filter is that two metal electrodes sandwich a piezoelectric film (the thickness of the Quartz substrate is 2um at 2GHz), and the acoustic wave oscillates in the piezoelectric film to form a standing wave.

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"Quartz crystals require additional components to extend their accuracy -- over time -- as their performance changes beyond controllable temperature changes," he added. In addition, Solis said, "using a BAW resonator is more efficient than using a quartz crystal. precise.

TPS73725DCQR_TPS7B6933QDCYRQ1

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. In order to keep the acoustic wave in the piezoelectric film to oscillate, there must be sufficient isolation between the oscillating structure and the external environment to obtain a small loss and a large Q value. On the other side of the oscillating structure, the acoustic impedance of the piezoelectric material is not much different from that of other substrates (such as Si), so the piezoelectric layer cannot be deposited directly on the Si substrate. The propagation speed of sound waves in solids is ~5000m/s, which means that the acoustic impedance of solids is about 105 times that of air, so 99.995% of the sound wave energy will be reflected back at the boundary between the solid and the air, which is the same as the original wave (incident wave). together to form a standing wave.

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TPS73725DCQR_TPS7B6933QDCYRQ1

There are many types of BAW filters, including ladder type filter, lattice type filter, stacked crystal filter and coupled resonator filter. Only the ladder type and lattice type are briefly introduced here. The BAW filter can connect multiple resonators according to a certain topology.

The typical basic structure is shown in the figure (a) above, with the piezoelectric layer sandwiched between the upper and lower metal electrodes, the corresponding mBVD equivalent circuit is shown in the figure (b) above, and the corresponding impedance is shown in the figure (c) above. It can be seen that there are two resonance frequencies, series (fs) and parallel (fp). The working principle is as shown below.

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